产品介绍slamf60防爆型数模橡胶密封质量流量计​
mass flow controller / meter
sec-z512mgx sec-z522mgxn sec-z522mgx
sec-z512x sec-z522xn sec-z522x
sef-z512mgx sef-z522mgxn sef-z522mgx
sef-z512x sef-z522xn sef-z522x
full-scale flow rate mr/mg number
(n2 conversion flow rate) #r01:10sccm
#r1.5:17.5sccm
#01:30sccm
#1.5:55sccm
#02:100sccm
#2.5:175sccm
#03:300sccm
#3.5:550sccm
#04:1slm
#4.5:1.75slm
#05:3slm
#5.5:5.5slm
#06:10slm
valve type
flow rate at fully closed control valve
flow rate control range
flow rate measuring range (sef)
operating temperature
response
linearity
repeatability
50 to 300 kpa (d)
#5.5, #06: 100 to 300 kpa (d)
operating differential pressure (sef)
max. operating pressure
pressure resistance
leak integrity
flow rate setting signal
flow rate output signal
wetted materials
1/4 inch vcr equivalent
option: 1.125 inch igs
mounting orientation
*1 the gas type and full scale settings for the sec(sef)-z512mgx, z522mgx, and z522mgxn can be changed
by the operator, using special software.
*2 the flow rate precision guaranteed temperatures conform to semi e56-1296 standards. the precision is that
associated with the full-scale mr and mg number values.
*3 igs: integrated gas system
* sccm and slm are notations indicating the gas flow rate (ml/min, l/min, at 0°c and 101.3 kpa).
mass flow controller model *1 sec-z512kx
mass flow meter model *1 sef-z512kx
o: normally open c: normally closed
≤ 2% f.s.
2-100% of f.s.
1/2sccm
mr/mg number
#6.5: 22slm
#07: 30slm
#08: 50slm
0-100% of f.s.
accuracy *2 ±1.0%f.s. ±1.0%s.p.(flow rate>25%f.s.)
±0.25%f.s.(flow rate≤25%f.s.)
5 to 50°c (recommended temperature range: 15 to 45°c)
≤ 1 second: over full flow rate range
≤ ±0.5% f.s.
≤ ±0.2% f.s.
operating differential pressure 50 to 300 kpa (d) 200 to 300 kpa (d)
≤ 300 kpa (d)
450 kpa (g)
1000 kpa (g)
≤ 5 x 10-12 pa·m3/s (he)
0.1 to 5 v dc (2% to f.s.); input impedance 1 mù or higher
0 to 5 v dc (0% to f.s.); minimum load resistance 2 kù or higher
digital interface
with address function: rs-485 (transmission speed 38,400 bps)
f-net protocol
316l stainless steel (polished surface)
power supply
+15v±5% 150ma
-15v±5% 150ma
signal response
analog: d-sub 9-pin (top)
digital: 2 lan jacks (top)
standard fitting *3
1/4 inch vcr equivalent
option: 1.125 inch igs, 1.5 inch igs
1.5 inch igs
free
z512/522 web ver.001
subject to change without notice.
​

---

仁荷泰可（北京）科技有限公司

15935096334
中国 北京